diff --git a/GNUmakefile b/GNUmakefile
index ef6af6f2d3..2ad4f323b4 100644
--- a/GNUmakefile
+++ b/GNUmakefile
@@ -215,58 +215,112 @@ fmt-check: ## Warn if any source needs reformatting
 
 gen-device: gen-device-avr gen-device-esp gen-device-nrf gen-device-sam gen-device-sifive gen-device-kendryte gen-device-nxp gen-device-rp ## Generate microcontroller-specific sources
 ifneq ($(RENESAS), 0)
-gen-device: gen-device-renesas
+# Renesas is currently unused
+#gen-device: gen-device-renesas
 endif
 ifneq ($(STM32), 0)
 gen-device: gen-device-stm32
 endif
 
-gen-device-avr:
-	@if [ ! -e lib/avr/README.md ]; then echo "Submodules have not been downloaded. Please download them using:\n  git submodule update --init"; exit 1; fi
-	$(GO) build -o ./build/gen-device-avr ./tools/gen-device-avr/
-	./build/gen-device-avr lib/avr/packs/atmega src/device/avr/
-	./build/gen-device-avr lib/avr/packs/tiny src/device/avr/
-	@GO111MODULE=off $(GO) fmt ./src/device/avr
+build/gen-device-%: ./tools/gen-device-%/*.go
+	$(GO) build -o $@ ./tools/gen-device-$*/
 
-build/gen-device-svd: ./tools/gen-device-svd/*.go
-	$(GO) build -o $@ ./tools/gen-device-svd/
+gen-device-avr: gen-device-atmega gen-device-attiny
 
-gen-device-esp: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/Espressif-Community -interrupts=software lib/cmsis-svd/data/Espressif-Community/ src/device/esp/
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/Espressif -interrupts=software lib/cmsis-svd/data/Espressif/ src/device/esp/
-	GO111MODULE=off $(GO) fmt ./src/device/esp
+# ATmega
 
-gen-device-nrf: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/NordicSemiconductor/nrfx/tree/master/mdk lib/nrfx/mdk/ src/device/nrf/
-	GO111MODULE=off $(GO) fmt ./src/device/nrf
+DEVICES_AVR_MEGA = 1280 1284P 2560 328PB 328P 32U4
 
-gen-device-nxp: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/NXP lib/cmsis-svd/data/NXP/ src/device/nxp/
-	GO111MODULE=off $(GO) fmt ./src/device/nxp
+gen-device-atmega: $(foreach m,$(DEVICES_AVR_MEGA),src/device/avr/ATmega$(m).go src/device/avr/ATmega$(m).s src/device/avr/ATmega$(m).ld)
 
-gen-device-sam: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/Atmel lib/cmsis-svd/data/Atmel/ src/device/sam/
-	GO111MODULE=off $(GO) fmt ./src/device/sam
+src/device/avr/ATmega%.go src/device/avr/ATmega%.s src/device/avr/ATmega%.ld: lib/avr/packs/atmega/ATmega%.atdf build/gen-device-avr
+	build/gen-device-avr $< src/device/avr/ATmega$*.go src/device/avr/ATmega$*.s src/device/avr/ATmega$*.ld
 
-gen-device-sifive: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/SiFive-Community -interrupts=software lib/cmsis-svd/data/SiFive-Community/ src/device/sifive/
-	GO111MODULE=off $(GO) fmt ./src/device/sifive
+# ATtiny
 
-gen-device-kendryte: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/Kendryte-Community -interrupts=software lib/cmsis-svd/data/Kendryte-Community/ src/device/kendryte/
-	GO111MODULE=off $(GO) fmt ./src/device/kendryte
+DEVICES_AVR_TINY = 1616 85
 
-gen-device-stm32: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/tinygo-org/stm32-svd lib/stm32-svd/svd src/device/stm32/
-	GO111MODULE=off $(GO) fmt ./src/device/stm32
+gen-device-attiny: $(foreach m,$(DEVICES_AVR_TINY),src/device/avr/ATtiny$(m).go src/device/avr/ATtiny$(m).s src/device/avr/ATtiny$(m).ld)
 
-gen-device-rp: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/posborne/cmsis-svd/tree/master/data/RaspberryPi lib/cmsis-svd/data/RaspberryPi/ src/device/rp/
-	GO111MODULE=off $(GO) fmt ./src/device/rp
+src/device/avr/ATtiny%.go src/device/avr/ATtiny%.s src/device/avr/ATtiny%.ld: lib/avr/packs/tiny/ATtiny%.atdf build/gen-device-avr
+	build/gen-device-avr $< src/device/avr/ATtiny$*.go src/device/avr/ATtiny$*.s src/device/avr/ATtiny$*.ld
+
+# Espressif
+
+# Both Espressif and Espressif-Community define esp32.
+# The Espressif directory takes priority. 
+
+gen-device-esp: src/device/esp/esp32c3.go src/device/esp/esp32s3.go src/device/esp/esp32.go src/device/esp/esp8266.go
+
+src/device/esp/%.go: lib/cmsis-svd/data/Espressif/%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/Espressif -interrupts=software $< $@
+
+src/device/esp/%.go: lib/cmsis-svd/data/Espressif-Community/%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/Espressif-Community -interrupts=software $< $@
+
+# NRF
+
+DEVICES_NRF = 51 52833 52840 52
+
+gen-device-nrf: $(foreach m,$(DEVICES_NRF),src/device/nrf/nrf$(m).go src/device/nrf/nrf$(m).s)
+
+src/device/nrf/nrf%.go src/device/nrf/nrf%.s: lib/nrfx/mdk/nrf%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/NordicSemiconductor/nrfx/tree/master/mdk -asm=src/device/nrf/nrf$*.s $< src/device/nrf/nrf$*.go
+
+# NXP
+
+DEVICES_NXP = MIMXRT1062 MK66F18
+
+gen-device-nxp: $(foreach m,$(DEVICES_NXP),src/device/nxp/$(m).go src/device/nxp/$(m).s)
+
+src/device/nxp/%.go src/device/nxp/%.s: lib/cmsis-svd/data/NXP/%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/NXP -asm=src/device/nxp/$*.s $< src/device/nxp/$*.go
+
+# SAM
+
+DEVICES_SAM = D21E18A D21G18A D51G19A D51J19A D51J20A D51P19A D51P20A D51J19A E51J19A E54P20A
+
+gen-device-sam: $(foreach m,$(DEVICES_SAM),src/device/sam/ATSAM$(m).go src/device/sam/ATSAM$(m).s)
+
+src/device/sam/ATSAM%.go src/device/sam/ATSAM%.s: lib/cmsis-svd/data/Atmel/ATSAM%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/Atmel -asm=src/device/sam/ATSAM$*.s $< src/device/sam/ATSAM$*.go
+
+# SiFive
+
+DEVICES_SIFIVE = e310x
+
+gen-device-sifive: $(foreach m,$(DEVICES_SIFIVE),src/device/sifive/$(m).go)
+
+src/device/sifive/%.go: lib/cmsis-svd/data/SiFive-Community/%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/SiFive-Community -interrupts=software $< $@
+
+# Kendryte
+
+DEVICES_KENDRYTE = 210
+
+gen-device-kendryte: $(foreach m,$(DEVICES_KENDRYTE),src/device/kendryte/k$(m).go)
+
+src/device/kendryte/k%.go: lib/cmsis-svd/data/Kendryte-Community/k%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/Kendryte-Community -interrupts=software $< $@
+
+# STM32
+
+DEVICES_STM32 = f103 f405 f407 f469 f722 g0b1 l4r5 l0x1 l0x2 l4x2 l4x5 l4x6 l552 u585 wl5x_cm4 wle5
+
+gen-device-stm32: $(foreach m,$(DEVICES_STM32),src/device/stm32/stm32$(m).go src/device/stm32/stm32$(m).s)
+
+src/device/stm32/stm32%.go src/device/stm32/stm32%.s: lib/stm32-svd/svd/stm32%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/tinygo-org/stm32-svd -asm=src/device/stm32/stm32$*.s $< src/device/stm32/stm32$*.go
+
+# Raspberry Pi
+
+DEVICES_RP = 2040 2350
+
+gen-device-rp: $(foreach m,$(DEVICES_RP),src/device/rp/rp$(m).go src/device/rp/rp$(m).s)
+
+src/device/rp/rp%.go src/device/rp/rp%.s: lib/cmsis-svd/data/RaspberryPi/rp%.svd build/gen-device-svd
+	build/gen-device-svd -url=https://github.com/posborne/cmsis-svd/tree/master/data/RaspberryPi -asm=src/device/rp/rp$*.s $< src/device/rp/rp$*.go
 
-gen-device-renesas: build/gen-device-svd
-	./build/gen-device-svd -source=https://github.com/cmsis-svd/cmsis-svd-data/tree/master/data/Renesas lib/cmsis-svd/data/Renesas/ src/device/renesas/
-	GO111MODULE=off $(GO) fmt ./src/device/renesas
 
 $(LLVM_PROJECTDIR)/llvm:
 	git clone -b tinygo_20.x --depth=1 https://github.com/tinygo-org/llvm-project $(LLVM_PROJECTDIR)
diff --git a/src/device/kendryte/.gitignore b/src/device/kendryte/.gitignore
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/src/device/sifive/.gitignore b/src/device/sifive/.gitignore
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/src/device/stm32/.gitignore b/src/device/stm32/.gitignore
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/targets/atmega1280.json b/targets/atmega1280.json
index 34e78f41df..6eb102f007 100644
--- a/targets/atmega1280.json
+++ b/targets/atmega1280.json
@@ -6,9 +6,9 @@
     "ldflags": [
         "--defsym=_stack_size=512"
     ],
-    "linkerscript": "src/device/avr/atmega1280.ld",
+    "linkerscript": "src/device/avr/ATmega1280.ld",
     "extra-files": [
         "targets/avr.S",
-        "src/device/avr/atmega1280.s"
+        "src/device/avr/ATmega1280.s"
     ]
 }
diff --git a/targets/atmega1284p.json b/targets/atmega1284p.json
index 501fb58d17..9256513f04 100644
--- a/targets/atmega1284p.json
+++ b/targets/atmega1284p.json
@@ -7,10 +7,10 @@
         "--defsym=_bootloader_size=0",
         "--defsym=_stack_size=512"
     ],
-    "linkerscript": "src/device/avr/atmega1284p.ld",
+    "linkerscript": "src/device/avr/ATmega1284P.ld",
     "extra-files": [
         "targets/avr.S",
-        "src/device/avr/atmega1284p.s"
+        "src/device/avr/ATmega1284P.s"
     ],
     "emulator": "simavr -m atmega1284p -f 20000000 {}"
 }
diff --git a/targets/atmega2560.json b/targets/atmega2560.json
index a00179ef98..eb454e8caf 100644
--- a/targets/atmega2560.json
+++ b/targets/atmega2560.json
@@ -6,9 +6,9 @@
     "ldflags": [
         "--defsym=_stack_size=512"
     ],
-    "linkerscript": "src/device/avr/atmega2560.ld",
+    "linkerscript": "src/device/avr/ATmega2560.ld",
     "extra-files": [
         "targets/avr.S",
-        "src/device/avr/atmega2560.s"
+        "src/device/avr/ATmega2560.s"
     ]
 }
diff --git a/targets/atmega328p.json b/targets/atmega328p.json
index d4098d4b86..c281dcec29 100644
--- a/targets/atmega328p.json
+++ b/targets/atmega328p.json
@@ -3,9 +3,9 @@
 	"cpu": "atmega328p",
 	"build-tags": ["atmega328p", "atmega", "avr5"],
 	"serial": "uart",
-	"linkerscript": "src/device/avr/atmega328p.ld",
+	"linkerscript": "src/device/avr/ATmega328P.ld",
 	"extra-files": [
 		"targets/avr.S",
-		"src/device/avr/atmega328p.s"
+		"src/device/avr/ATmega328P.s"
 	]
 }
diff --git a/targets/atmega328pb.json b/targets/atmega328pb.json
index c4e1b447f4..1789f9f45f 100644
--- a/targets/atmega328pb.json
+++ b/targets/atmega328pb.json
@@ -7,9 +7,9 @@
 		"--defsym=_stack_size=512"
 	],
 	"serial": "uart",
-	"linkerscript": "src/device/avr/atmega328pb.ld",
+	"linkerscript": "src/device/avr/ATmega328PB.ld",
 	"extra-files": [
 		"targets/avr.S",
-		"src/device/avr/atmega328pb.s"
+		"src/device/avr/ATmega328PB.s"
 	]
 }
diff --git a/targets/atmega32u4.json b/targets/atmega32u4.json
index 7aa2c08bd2..75c7efb542 100644
--- a/targets/atmega32u4.json
+++ b/targets/atmega32u4.json
@@ -3,9 +3,9 @@
 	"cpu": "atmega32u4",
 	"build-tags": ["atmega32u4", "avr5"],
 	"serial": "none",
-	"linkerscript": "src/device/avr/atmega32u4.ld",
+	"linkerscript": "src/device/avr/ATmega32U4.ld",
 	"extra-files": [
 		"targets/avr.S",
-		"src/device/avr/atmega32u4.s"
+		"src/device/avr/ATmega32U4.s"
 	]
 }
diff --git a/targets/atsamd21e18a.json b/targets/atsamd21e18a.json
index 92b671c9f6..fb42e1e0b2 100644
--- a/targets/atsamd21e18a.json
+++ b/targets/atsamd21e18a.json
@@ -4,7 +4,7 @@
 	"serial": "usb",
 	"linkerscript": "targets/atsamd21.ld",
 	"extra-files": [
-		"src/device/sam/atsamd21e18a.s"
+		"src/device/sam/ATSAMD21E18A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "at91samdXX"
diff --git a/targets/atsamd21g18a.json b/targets/atsamd21g18a.json
index db46c96288..e6bb4231d1 100644
--- a/targets/atsamd21g18a.json
+++ b/targets/atsamd21g18a.json
@@ -4,7 +4,7 @@
 	"serial": "usb",
 	"linkerscript": "targets/atsamd21.ld",
 	"extra-files": [
-		"src/device/sam/atsamd21g18a.s"
+		"src/device/sam/ATSAMD21G18A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "at91samdXX"
diff --git a/targets/atsamd51g19a.json b/targets/atsamd51g19a.json
index 4534d1c1a8..5708bbec06 100644
--- a/targets/atsamd51g19a.json
+++ b/targets/atsamd51g19a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["atsamd51g19a", "atsamd51g19", "atsamd51", "sam"],
 	"linkerscript": "targets/atsamd51.ld",
 	"extra-files": [
-		"src/device/sam/atsamd51g19a.s"
+		"src/device/sam/ATSAMD51G19A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/atsamd51j19a.json b/targets/atsamd51j19a.json
index 2493ca4ddc..18c5011e53 100644
--- a/targets/atsamd51j19a.json
+++ b/targets/atsamd51j19a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["atsamd51j19a", "atsamd51j19", "atsamd51", "sam"],
 	"linkerscript": "targets/atsamd51.ld",
 	"extra-files": [
-		"src/device/sam/atsamd51j19a.s"
+		"src/device/sam/ATSAMD51J19A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/atsamd51j20a.json b/targets/atsamd51j20a.json
index 9f59e32d46..d5493a32eb 100644
--- a/targets/atsamd51j20a.json
+++ b/targets/atsamd51j20a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["sam", "atsamd51", "atsamd51j20", "atsamd51j20a"],
 	"linkerscript": "targets/atsamd51j20a.ld",
 	"extra-files": [
-		"src/device/sam/atsamd51j20a.s"
+		"src/device/sam/ATSAMD51J20A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/atsamd51p19a.json b/targets/atsamd51p19a.json
index 6b2f6b5b39..c51adb00df 100644
--- a/targets/atsamd51p19a.json
+++ b/targets/atsamd51p19a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["atsamd51p19a", "atsamd51p19", "atsamd51", "sam"],
 	"linkerscript": "targets/atsamd51.ld",
 	"extra-files": [
-		"src/device/sam/atsamd51p19a.s"
+		"src/device/sam/ATSAMD51P19A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/atsamd51p20a.json b/targets/atsamd51p20a.json
index bc66ca0321..d18161b91e 100644
--- a/targets/atsamd51p20a.json
+++ b/targets/atsamd51p20a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["sam", "atsamd51", "atsamd51p20", "atsamd51p20a"],
 	"linkerscript": "targets/atsamd51p20a.ld",
 	"extra-files": [
-		"src/device/sam/atsamd51p20a.s"
+		"src/device/sam/ATSAMD51P20A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/atsame51j19a.json b/targets/atsame51j19a.json
index 98136769dd..93ef8599d4 100644
--- a/targets/atsame51j19a.json
+++ b/targets/atsame51j19a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["atsame51j19a", "atsame51j19", "atsame51", "atsame5x", "sam"],
 	"linkerscript": "targets/atsame5xx19.ld",
 	"extra-files": [
-		"src/device/sam/atsame51j19a.s"
+		"src/device/sam/ATSAME51J19A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/atsame54p20a.json b/targets/atsame54p20a.json
index f2450fb421..04192be37f 100644
--- a/targets/atsame54p20a.json
+++ b/targets/atsame54p20a.json
@@ -3,7 +3,7 @@
 	"build-tags": ["sam", "atsame5x", "atsame54", "atsame54p20", "atsame54p20a"],
 	"linkerscript": "targets/atsame5xx20-no-bootloader.ld",
 	"extra-files": [
-		"src/device/sam/atsame54p20a.s"
+		"src/device/sam/ATSAME54P20A.s"
 	],
 	"openocd-transport": "swd",
 	"openocd-target": "atsame5x"
diff --git a/targets/attiny1616.json b/targets/attiny1616.json
index 38e645ae1b..8c5c50c79d 100644
--- a/targets/attiny1616.json
+++ b/targets/attiny1616.json
@@ -6,9 +6,9 @@
     "cflags": [
         "-D__AVR_ARCH__=103"
     ],
-    "linkerscript": "src/device/avr/attiny1616.ld",
+    "linkerscript": "src/device/avr/ATtiny1616.ld",
     "extra-files": [
-        "src/device/avr/attiny1616.s"
+        "src/device/avr/ATtiny1616.s"
     ],
     "flash-command": "pymcuprog write -f {hex} --erase --verify -d attiny1616 -t uart -u {port}"
 }
diff --git a/targets/attiny85.json b/targets/attiny85.json
index 3fb1111479..a3f24b6718 100644
--- a/targets/attiny85.json
+++ b/targets/attiny85.json
@@ -5,9 +5,9 @@
 	"cflags": [
 		"-D__AVR_ARCH__=25"
 	],
-	"linkerscript": "src/device/avr/attiny85.ld",
+	"linkerscript": "src/device/avr/ATtiny85.ld",
 	"extra-files": [
 		"targets/avr.S",
-		"src/device/avr/attiny85.s"
+		"src/device/avr/ATtiny85.s"
 	]
 }
diff --git a/targets/teensy36.json b/targets/teensy36.json
index 253e397043..78503c74f6 100644
--- a/targets/teensy36.json
+++ b/targets/teensy36.json
@@ -4,9 +4,8 @@
 	"serial": "uart",
 	"linkerscript": "targets/nxpmk66f18.ld",
 	"extra-files": [
-		"src/device/nxp/mk66f18.s",
+		"src/device/nxp/MK66F18.s",
 		"targets/teensy36.s"
 	],
 	"flash-command": "teensy_loader_cli -mmcu=mk66fx1m0 -v -w {hex}"
 }
-
diff --git a/targets/teensy40.json b/targets/teensy40.json
index 223db6f6f1..3595a059e8 100644
--- a/targets/teensy40.json
+++ b/targets/teensy40.json
@@ -5,7 +5,7 @@
   "automatic-stack-size": false,
   "linkerscript": "targets/mimxrt1062-teensy40.ld",
   "extra-files": [
-    "src/device/nxp/mimxrt1062.s",
+    "src/device/nxp/MIMXRT1062.s",
     "targets/teensy40.s"
   ],
   "flash-command": "teensy_loader_cli -mmcu=imxrt1062 -v -w {hex}"
diff --git a/targets/teensy41.json b/targets/teensy41.json
index 8866bc48e3..28b2ea42ec 100644
--- a/targets/teensy41.json
+++ b/targets/teensy41.json
@@ -5,7 +5,7 @@
   "automatic-stack-size": false,
   "linkerscript": "targets/mimxrt1062-teensy40.ld",
   "extra-files": [
-    "src/device/nxp/mimxrt1062.s",
+    "src/device/nxp/MIMXRT1062.s",
     "targets/teensy40.s"
   ],
   "flash-command": "teensy_loader_cli -mmcu=imxrt1062 -v -w {hex}"
diff --git a/tools/gen-device-avr/gen-device-avr.go b/tools/gen-device-avr/gen-device-avr.go
index de32e3ed95..0fc01d04a4 100755
--- a/tools/gen-device-avr/gen-device-avr.go
+++ b/tools/gen-device-avr/gen-device-avr.go
@@ -1,18 +1,17 @@
 package main
 
 import (
-	"bufio"
+	"bytes"
 	"encoding/xml"
 	"fmt"
+	"go/format"
 	"html/template"
 	"math/bits"
 	"os"
 	"path/filepath"
-	"runtime"
 	"sort"
 	"strconv"
 	"strings"
-	"sync"
 )
 
 type AVRToolsDeviceFile struct {
@@ -398,14 +397,8 @@ func readATDF(path string) (*Device, error) {
 	}, nil
 }
 
-func writeGo(outdir string, device *Device) error {
+func writeGo(dst string, device *Device) error {
 	// The Go module for this device.
-	outf, err := os.Create(outdir + "/" + device.metadata["nameLower"].(string) + ".go")
-	if err != nil {
-		return err
-	}
-	defer outf.Close()
-	w := bufio.NewWriter(outf)
 
 	maxInterruptNum := 0
 	for _, intr := range device.interrupts {
@@ -484,9 +477,11 @@ type {{.Name}}_Type struct {
 {{end}}
 {{end}}
 `))
-	err = t.Execute(w, map[string]interface{}{
+	var buf bytes.Buffer
+	w := &buf
+	err := t.Execute(w, map[string]interface{}{
 		"metadata":     device.metadata,
-		"pkgName":      filepath.Base(strings.TrimRight(outdir, "/")),
+		"pkgName":      filepath.Base(filepath.Dir(dst)),
 		"interrupts":   device.interrupts,
 		"interruptMax": maxInterruptNum,
 		"instances":    device.instances,
@@ -559,12 +554,20 @@ type {{.Name}}_Type struct {
 		}
 		fmt.Fprintf(w, ")\n")
 	}
-	return w.Flush()
+
+	// Format the source.
+	formatted, err := format.Source(buf.Bytes())
+	if err != nil {
+		return err
+	}
+
+	// Save the file.
+	return os.WriteFile(dst, formatted, 0666)
 }
 
-func writeAsm(outdir string, device *Device) error {
+func writeAsm(dst string, device *Device) error {
 	// The interrupt vector, which is hard to write directly in Go.
-	out, err := os.Create(outdir + "/" + device.metadata["nameLower"].(string) + ".s")
+	out, err := os.Create(dst)
 	if err != nil {
 		return err
 	}
@@ -628,9 +631,9 @@ __vector_default:
 	return nil
 }
 
-func writeLD(outdir string, device *Device) error {
+func writeLD(dst string, device *Device) error {
 	// Variables for the linker script.
-	out, err := os.Create(outdir + "/" + device.metadata["nameLower"].(string) + ".ld")
+	out, err := os.Create(dst)
 	if err != nil {
 		return err
 	}
@@ -649,73 +652,28 @@ __num_isrs   = {{.numInterrupts}};
 	return t.Execute(out, device.metadata)
 }
 
-func processFile(filepath, outdir string) error {
-	device, err := readATDF(filepath)
+func main() {
+	src := os.Args[1]
+	dstGo := os.Args[2]
+	dstASM := os.Args[3]
+	dstLD := os.Args[4]
+
+	device, err := readATDF(src)
 	if err != nil {
-		return err
+		fmt.Fprintln(os.Stderr, err)
+		os.Exit(1)
 	}
-	err = writeGo(outdir, device)
+	err = writeGo(dstGo, device)
 	if err != nil {
-		return err
+		fmt.Fprintln(os.Stderr, err)
+		os.Exit(1)
 	}
-	err = writeAsm(outdir, device)
+	err = writeAsm(dstASM, device)
 	if err != nil {
-		return err
-	}
-	return writeLD(outdir, device)
-}
-
-func generate(indir, outdir string) error {
-	// Read list of ATDF files to process.
-	matches, err := filepath.Glob(indir + "/*.atdf")
-	if err != nil {
-		return err
-	}
-
-	// Start worker goroutines.
-	var wg sync.WaitGroup
-	workChan := make(chan string)
-	errChan := make(chan error, 1)
-	for i := 0; i < runtime.NumCPU(); i++ {
-		go func() {
-			for filepath := range workChan {
-				err := processFile(filepath, outdir)
-				wg.Done()
-				if err != nil {
-					// Store error to errChan if no error was stored before.
-					select {
-					case errChan <- err:
-					default:
-					}
-				}
-			}
-		}()
-	}
-
-	// Submit all jobs to the goroutines.
-	wg.Add(len(matches))
-	for _, filepath := range matches {
-		fmt.Println(filepath)
-		workChan <- filepath
-	}
-	close(workChan)
-
-	// Wait until all workers have finished.
-	wg.Wait()
-
-	// Check for an error.
-	select {
-	case err := <-errChan:
-		return err
-	default:
-		return nil
+		fmt.Fprintln(os.Stderr, err)
+		os.Exit(1)
 	}
-}
-
-func main() {
-	indir := os.Args[1]  // directory with register descriptor files (*.atdf)
-	outdir := os.Args[2] // output directory
-	err := generate(indir, outdir)
+	err = writeLD(dstLD, device)
 	if err != nil {
 		fmt.Fprintln(os.Stderr, err)
 		os.Exit(1)
diff --git a/tools/gen-device-svd/gen-device-svd.go b/tools/gen-device-svd/gen-device-svd.go
index ef9dedff97..5b5d73e211 100755
--- a/tools/gen-device-svd/gen-device-svd.go
+++ b/tools/gen-device-svd/gen-device-svd.go
@@ -2,11 +2,11 @@ package main
 
 import (
 	"bufio"
+	"bytes"
 	"encoding/xml"
-	"errors"
 	"flag"
 	"fmt"
-	"io/fs"
+	"go/format"
 	"os"
 	"path/filepath"
 	"regexp"
@@ -1215,14 +1215,7 @@ func parseRegister(groupName string, regEl *SVDRegister, baseAddress uint64, bit
 }
 
 // The Go module for this device.
-func writeGo(outdir string, device *Device, interruptSystem string) error {
-	outf, err := os.Create(filepath.Join(outdir, device.Metadata.NameLower+".go"))
-	if err != nil {
-		return err
-	}
-	defer outf.Close()
-	w := bufio.NewWriter(outf)
-
+func writeGo(dst string, device *Device, interruptSystem string) error {
 	maxInterruptValue := 0
 	for _, intr := range device.Interrupts {
 		if intr.Value > maxInterruptValue {
@@ -1326,10 +1319,12 @@ var (
 )
 
 `))
-	pkgName := filepath.Base(strings.TrimRight(outdir, "/"))
+	pkgName := filepath.Base(filepath.Dir(dst))
 	tweakDevice(device, pkgName)
 
-	err = t.Execute(w, map[string]interface{}{
+	var buf bytes.Buffer
+	w := &buf
+	err := t.Execute(w, map[string]interface{}{
 		"device":            device,
 		"pkgName":           pkgName,
 		"interruptMax":      maxInterruptValue,
@@ -1594,10 +1589,17 @@ var (
 		w.WriteString(")\n")
 	}
 
-	return w.Flush()
+	// Format the source.
+	formatted, err := format.Source(buf.Bytes())
+	if err != nil {
+		return err
+	}
+
+	// Save the file.
+	return os.WriteFile(dst, formatted, 0666)
 }
 
-func writeGoRegisterConstants(w *bufio.Writer, register *PeripheralField, name string) {
+func writeGoRegisterConstants(w *bytes.Buffer, register *PeripheralField, name string) {
 	w.WriteString("\n\t// " + name)
 	if register.Description != "" {
 		if isMultiline(register.Description) {
@@ -1619,7 +1621,7 @@ func writeGoRegisterConstants(w *bufio.Writer, register *PeripheralField, name s
 	}
 }
 
-func writeGoRegisterBitfieldType(w *bufio.Writer, register *PeripheralField, peripheralName, registerName string) {
+func writeGoRegisterBitfieldType(w *bytes.Buffer, register *PeripheralField, peripheralName, registerName string) {
 	if len(register.Bitfields) == 0 {
 		return
 	}
@@ -1692,8 +1694,8 @@ func writeGoRegisterBitfieldType(w *bufio.Writer, register *PeripheralField, per
 }
 
 // The interrupt vector, which is hard to write directly in Go.
-func writeAsm(outdir string, device *Device) error {
-	outf, err := os.Create(filepath.Join(outdir, device.Metadata.NameLower+".s"))
+func writeAsm(dst string, device *Device) error {
+	outf, err := os.Create(dst)
 	if err != nil {
 		return err
 	}
@@ -1796,58 +1798,33 @@ __isr_vector:
 	return w.Flush()
 }
 
-func generate(indir, outdir, sourceURL, interruptSystem string) error {
-	if _, err := os.Stat(indir); errors.Is(err, fs.ErrNotExist) {
-		fmt.Fprintln(os.Stderr, "cannot find input directory:", indir)
-		os.Exit(1)
-	}
-	os.MkdirAll(outdir, 0777)
-
-	infiles, err := filepath.Glob(filepath.Join(indir, "*.svd"))
-	if err != nil {
-		fmt.Fprintln(os.Stderr, "could not read .svd files:", err)
-		os.Exit(1)
-	}
-	sort.Strings(infiles)
-	for _, infile := range infiles {
-		fmt.Println(infile)
-		device, err := readSVD(infile, sourceURL)
-		if err != nil {
-			return fmt.Errorf("failed to read: %w", err)
-		}
-		err = writeGo(outdir, device, interruptSystem)
-		if err != nil {
-			return fmt.Errorf("failed to write Go file: %w", err)
-		}
-		switch interruptSystem {
-		case "software":
-			// Nothing to do.
-		case "hardware":
-			err = writeAsm(outdir, device)
-			if err != nil {
-				return fmt.Errorf("failed to write assembly file: %w", err)
-			}
-		default:
-			return fmt.Errorf("unknown interrupt system: %s", interruptSystem)
-		}
-	}
-	return nil
-}
-
 func main() {
-	sourceURL := flag.String("source", "<unknown>", "source SVD file")
+	sourceURL := flag.String("url", "<unknown>", "URL of source SVD repository")
 	interruptSystem := flag.String("interrupts", "hardware", "interrupt system in use (software, hardware)")
+	asmDst := flag.String("asm", "", "destination path for assembly")
 	flag.Parse()
 	if flag.NArg() != 2 {
-		fmt.Fprintln(os.Stderr, "provide exactly two arguments: input directory (with .svd files) and output directory for generated files")
+		fmt.Fprintln(os.Stderr, "provide exactly two arguments: input path (.svd) and output path (.go)")
 		flag.PrintDefaults()
 		return
 	}
-	indir := flag.Arg(0)
-	outdir := flag.Arg(1)
-	err := generate(indir, outdir, *sourceURL, *interruptSystem)
+	src := flag.Arg(0)
+	dst := flag.Arg(1)
+	device, err := readSVD(src, *sourceURL)
+	if err != nil {
+		fmt.Fprintf(os.Stderr, "failed to read: %s\n", err)
+		os.Exit(1)
+	}
+	err = writeGo(dst, device, *interruptSystem)
 	if err != nil {
-		fmt.Fprintln(os.Stderr, err)
+		fmt.Fprintf(os.Stderr, "failed to write Go file: %s\n", err)
 		os.Exit(1)
 	}
+	if asm := *asmDst; asm != "" {
+		err = writeAsm(asm, device)
+		if err != nil {
+			fmt.Fprintf(os.Stderr, "failed to write assembly file: %s\n", err)
+			os.Exit(1)
+		}
+	}
 }